Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.
by
Baltes, Henry.
Title
:
Enabling Technologies for MEMS and Nanodevices : Advanced Micro and Nanosystems.
Author
:
Baltes, Henry.
ISBN
:
9783527616923
Personal Author
:
Baltes, Henry.
Edition
:
1st ed.
Physical Description
:
1 online resource (442 pages)
Series
:
Advanced Micro and Nanosystems Ser.
Contents
:
Advanced Micro & Nanosystems Volume 1 Enabling Technology for MEMS and Nanodevices -- Contents -- Preface -- List of Contributors -- 1 M3: the Third Dimension of Silicon -- 2 Trends in MEMS Commercialization -- 3 Capacitive Interfaces for MEMS -- 4 Packaging of Advanced Micro- and Nanosystems -- 5 High-frequency Integrated Microelectromechanical Resonators and Filters -- 6 MEMS in Mass Storage Systems -- 7 Scanning Micro- and Nanoprobes for Electrochemical Imaging -- 8 Nanofluidic Modeling and Simulation -- 9 Nanofluidics - Structures and Devices -- 10 Carbon Nanotubes and Sensors: a Review -- 11 CMOS-based DNA Sensor Arrays -- Subject Index.
Abstract
:
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.
Local Note
:
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2017. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Subject Term
:
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
Genre
:
Electronic books.
Added Author
:
Brand, Oliver.
Fedder, Gary K.
Kockmann, Norbert.
Korvink, Jan G.
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | Status |
---|
IYTE Library | E-Book | 1212290-1001 | TK7874 -- .E53 2013 EB | Ebrary E-Books |