Silicon processing for the VLSI era
by
 
Wolf, Stanley, 1943-

Title
: 
Silicon processing for the VLSI era

Author
: 
Wolf, Stanley, 1943-

ISBN
: 
9780961672164

Personal Author
: 
Wolf, Stanley, 1943-

Publication Information
: 
Sunset Beach, Calif. : Lattice Press, c2000- >

Physical Description
: 
v. <1- > : ill. ; 25 cm.

General Note
: 
JM20000323.

Contents
: 
v. 1. Process technology.

Subject Term
: 
Integrated circuits -- Very large scale integration.
 
Silicon.

Added Author
: 
Tauber, Richard N.


LibraryMaterial TypeItem BarcodeShelf NumberStatus
IYTE LibraryBook0009067TK7874.W635 2000 C.1Nilgül Uysal Çalışma Salonu