Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
by
 
Bourgade, Thomas

Title
: 
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Author
: 
Bourgade, Thomas

Personal Author
: 
Bourgade, Thomas

Publication Information
: 
Cambridge, MA MyJoVE Corp 2016

Physical Description
: 
online resource (628 seconds)

Series
: 
Engineering

General Note
: 
Title from resource description page

Abstract
: 
We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

Reading Level
: 
For undergraduate, graduate, and professional students

Subject Term
: 
Engineering

Electronic Access
: 
https://www.jove.com/t/53630


LibraryMaterial TypeItem BarcodeShelf NumberStatus
IYTE LibraryOnline Video2253647-1001XX(2253647.1)JoVe Video Online