Materials science in microelectronics
by
 
Machlin, E. S.

Title
Materials science in microelectronics

Author
Machlin, E. S.

ISBN
9780080446394

Personal Author
Machlin, E. S.

Edition
2nd ed.

Publication Information
Amsterdam ; Boston : Elsevier, 2005-

Physical Description
v. <1 > ; 24 cm.

Contents
v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films.

Abstract
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties.

Subject Term
Thin films.
 
Microelectronics.

Genre
Electronic books.

Added Corporate Author
ScienceDirect (Online service)

Electronic Access
ScienceDirect An electronic book accessible through the World Wide Web; click for information
 
Publisher description http://www.loc.gov/catdir/enhancements/fy0629/2005934958-d.html


LibraryMaterial TypeItem BarcodeShelf NumberStatus
IYTE LibraryE-Book67636-1001TK7871.15.F5M32 2005EBOnline