Materials science in microelectronics
by
Machlin, E. S.
Title
:
Materials science in microelectronics
Author
:
Machlin, E. S.
ISBN
:
9780080446394
Personal Author
:
Machlin, E. S.
Edition
:
2nd ed.
Publication Information
:
Amsterdam ; Boston : Elsevier, 2005-
Physical Description
:
v. <1 > ; 24 cm.
Contents
:
v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films.
Abstract
:
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties.
Subject Term
:
Thin films.
Microelectronics.
Genre
:
Electronic books.
Added Corporate Author
:
ScienceDirect (Online service)
Electronic Access
:
Library | Material Type | Item Barcode | Shelf Number | Status |
---|
IYTE Library | E-Book | 67636-1001 | TK7871.15.F5M32 2005EB | Online |