by
Chapman, Brian.
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Books
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Glow discharge processes;sputtering and plasma etching / Chapman, Brian.
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Posseme, Nicolas, editor.
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Plasma etching processes for CMOS devices realization / Posseme, Nicolas, editor.
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by
Posseme, Nicolas, editor.
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Plasma etching processes for interconnect realization in VLSI / Posseme, Nicolas, editor.
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Rossnagel, Stephen M.
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Electronic Resources
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Handbook of plasma processing technology fundamentals, etching, deposition, and surface
by
Lieberman, Michael A.
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Books
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Plasma etching.
by
Processing, Panel on Plasma.
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Plasma etching.
by
NATO Advanced Study Institute on Plasma Processing of Semiconductors (1996 : Bonas, France)
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Plasma etching -- Industrial applications.
by
Krasimir Vasilev (Ed.)
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plasma etching
by
Rananavare, Shankar B.
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plasma- and wet-etching steps.
by
Zhang, Naiqing
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reactive ion etching, and room-temperature plasma surface-activated multilayer bonding of single-crystal
by
Camino, Fernando E.
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Visual Materials
Excerpt:
fidelity using liftoff, plasma etching, and resist infiltration by organometallics.
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