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Nondestructive evalution and reliability of micro-and nanomaterial systems: 18-19 March 2002, Newport Beach, USA.
Title:
Nondestructive evalution and reliability of micro-and nanomaterial systems: 18-19 March 2002, Newport Beach, USA.
Author:
Meyendorf, Norbert.
ISBN:
9780819444516
Publication Information:
Bellingham,Wash,USA: SPIE, c2002
Physical Description:
ix, 228 p.: ill
Series:
SPIE proceedings series, v. 4703

Proceedings of SPIE--the International Society for Optical Engineering ; v. 4703
Subject Term:
Nanostructures materials -- Testing -- Congresses.

Microelectromechanical systems -- Evaluation.

Microelectromechinal systems -- Reliability.

Nondestructive testing -- Congresses.

Surfaces(Technology) -- Congresses.

Quality control -- Congresses.
Added Author:
Meyendorf, Norbert.

Baaklini, George Y.

Michel, Bernd.
Added Corporate Author:
Society of Photo-optical Instrumentation Engineers.
Holds: Copies:

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