Front Cover -- Micro-Manufacturing Engineering and Technology -- Copyright -- Contents -- Preface -- Contributors -- Chapter 1 - Overview of Micro-Manufacturing -- Introduction -- Micro-Products and Design Considerations for Manufacturing -- Material Factors -- Considerations on Manufacturing Methods -- Manufacturing Methods and Processes -- Mechanical Machining -- Micro-EDM -- Micro-Electrochemical Machining (MECM) -- Micro-forming -- Laser Technology -- Replication Techniques -- Deposition Methods -- Assembly/Packaging -- Process Chains and Hybrid Processes -- Manufacturing Systems/Equipment -- Miniature Manufacturing Systems and Bench-top Machines -- Multiple-process Equipment -- Supporting Technologies/Devices/Systems for Micro-manufacturing -- Development and Utilization Strategies of Micromanufacturing Technologies -- Manufacturing and Supply Chains -- Integration with Other Manufacturing Activities/Sectors -- Technological Performance/Maturity Level -- Other Issues -- References -- Chapter 2 - Micro-/Nano-Machining through Mechanical Cutting -- Introduction -- Fundamentals of the Micro-/Nano-Cutting Process -- Specific Energy and Cutting Force -- Minimum Chip Thickness and Chip Formation -- Ductile Mode Cutting -- Effect of Workpiece-material Micro-structure -- Modeling the Micro-/Nano-Cutting Process -- FE Modeling -- MD Modeling -- Multi-scale Modeling -- Precision Machines for Micro-/Nano-Cutting -- Ultra-precision Machine Tools -- Mechanical Structure -- Spindle and Drive System -- Control System -- Position Measurement and Feedback System -- In-process Condition Monitoring and Inspection System -- Micro- and Meso-machines -- Micro-Tooling -- Applications -- Competitive Technologies and Economic Considerations -- Acknowledgements -- References -- Chapter 3 - Micro-EDM -- Introduction -- Working Principle -- Machining Principle of EDM.

Process Variants -- Dielectric Fluid -- General Flushing Strategies -- Process Parameters and Process Capabilities -- Procedure of a Single Discharge -- Micro-wire EDM (µ-WEDM) -- Multiple Cutting Strategies -- Micro-wire Electrodes -- Dielectric Fluid and Flushing -- Dimensions and Applications -- Micro-wire Electrical Discharge Grinding (µ-WEDG) -- Micro-die Sinking EDM (µ-die Sinking EDM) -- Micro-Die Sinking Electrodes -- Dielectric Fluid and Flushing -- Dimensions and Applications -- Micro-electrical Discharge Drilling (µ-ED Drilling) -- Micro-drilling Electrodes -- Dielectric Fluid and Flushing -- Dimensions and Applications -- Micro-Electrical Discharge Contouring -- Micro-electrical Discharge Contouring Electrodes -- Dielectric Fluid and Flushing -- Dimensions and Applications -- Machines and Tools -- Machine Design -- Die-sinking EDM Machine -- Wire EDM Machine -- Generator Types -- Static Pulse Generators -- Relaxation Generators -- Adaptive Feed Control -- Design Considerations -- µ-EDM Optimized Design -- Material Selection -- Tool Electrodes for µ-EDM -- Applications -- Technological Competitiveness and Operation Economics -- The Outlook -- References -- Chapter 4 - Laser Micro-Structuring -- Introduction -- Basic Properties of Laser Ablation -- Absorption Effects on Ablation Geometry -- Thermal Effects on Ablation Precision and Ablation Geometry -- Process Principles for Laser Ablation -- Mask Technique -- Scribing Technique -- Examples -- Conclusions -- References -- Chapter 5 - Hot Embossing -- Introduction -- Hot Embossing Process -- Process Variations -- Double-sided Molding -- Multi-layer Molding -- Through-holes -- Hot Punching -- Thermoforming of High Temperature Polymers by Hot Embossing -- Roller Embossing -- Materials for Hot Embossing -- Hot Embossing Techniques -- Components -- Commercial Available Machines.

Jenoptik Mikrotechnik -- Wickert Press -- EV Group -- Hot Embossing Tools -- Basic Tools for Hot Embossing -- Micro-structured Mold Inserts -- Applications -- Micro-optical Devices -- Optical Waveguides -- Micro-fluidic Devices -- Capillary Analysis Systems -- Micro-needles -- The Outlook -- References -- Chapter 6 - Micro-Injection-Molding -- Introduction -- Micro-Injection Molding Scenario -- Micro-Injection Molding Technology -- Micro-molding with Conventional Injection Molding Machine -- Micro-injection Molding Machine -- Process Control and Analysis -- Micro-cavity Filling Analysis -- Short Shots Method -- Flow Visualization Tests -- Length Flow Tests -- Filling Analysis in µIM using Weld Lines as Flow Markers -- Micro-injection Molding Process Control and Analysis -- Defects of Micro-Injection Molded Parts: Weld Lines -- Process Simulation -- Conclusions -- References -- Chapter 7 - Micro-Bulk-Forming -- Introduction -- Basic Cold Forming Processes -- The Size Effect -- Workpiece Materials -- Amorphous Metals -- Tool Materials -- Machine and Tool Design -- Billet Preparation -- Press System -- The Tool Die System -- Precision and Alignment of Tooling Elements -- Flexibility of Tool System -- Warm Forging of Micro-components -- Handling and Ejection System -- Process Supervision -- Micro-Tribology -- Process Analysis -- References -- Chapter 8 - Forming of Micro-Sheet-Metal Components -- Introduction -- Manufacturing Processes and Fundamentals -- Manufacture of Sheet Metal Parts by Blanking/Punching -- Manufacture of Sheet Metal Parts by Bending -- Deep Drawing of Sheet Metal Parts -- Other Micro-sheet Metal-forming Processes -- General Considerations for Manufacturing -- Forming Tools -- Manufacturing Presses/Machines -- Design Considerations for Micro-Sheet Metal Parts for Forming -- Micro-Sheet Forming - A Case Study.

Technological Competitiveness and Operational Economics -- References -- Chapter 9 - Micro-Hydroforming -- Introduction -- Principle of Hydroforming and Process Variants -- Semi-Finished Products and Materials -- Process Chain for Part Production -- Hydroforming Process Design -- Design Considerations and Potential Applications of Micro-Hydroforming -- Tools and Machines -- Conclusions -- References -- Chapter 10 - Laser-Assisted Micro-Forming -- Introduction -- System Technology -- Processes -- Stamping -- Embossing -- Metals -- Plastics -- Glass -- Bonding of Plastic with Metal and Ceramic - LIFTEC® -- Conclusions -- References -- Chapter 11 - Micro-Mechanical-Assembly -- Introduction -- Classification of Micromechanical Assembly Methods -- Micro-snap Fits -- Micro-screwing -- Micro-Velcro -- Micro-joinery -- Micro-injection Molding -- Micro-riveting, Folding and Clinching -- Systematic Approach to Micro-Mechanical Handling and Assembly -- Application Example: Mechanical Assembly of Push Button Parts -- Conclusion -- References -- Chapter 12 - Laser Beam Micro-Joining -- Introduction -- Laser Beam Soldering -- Laser Beam Micro-Welding -- Processes and Results -- Beam Delivery -- Spot Welding -- Spaced Spot Welding -- Continuous Welding -- Applications of SHADOW® in fine Mechanics and Electronics -- Comparison of Conventional Pulsed Mode Welding to SHADOW® -- Pre-conditions and Limits of Laser Beam Micro-welding -- Conclusions and Remarks -- References -- Chapter 13 - Deep X-Ray Lithography -- Introduction -- The Liga Process and its Strengths -- Liga Manufacturing Steps -- Resist Technology -- Resist Deposition -- Irradiation Technology -- Synchrotron Source - Scanner -- PMMA Degradation -- PMMA Development -- Special Computer Programs for X-ray Lithography -- Micro-Electroplating Technology -- Design Rule - Mask Technology -- Metrology.

Unique Features of the Liga Process -- Market Situation of Deep X-Ray Lithography -- Commercial Applications -- Polymer Compound Refractive X-ray Lenses - Direct Resist Structure [5] -- Micro-spectrometer [31] - Mold -- Micro-gears - Direct Metal Parts [32] -- Conclusions -- References -- Chapter 14 - Surface Engineering and Micro-Manufacturing -- Introduction -- Surface Engineering -- Surface Contact Phenomena and Tribology -- Characterization Techniques -- Fundamentals of Advanced Surface Engineering Processes for Tooling Protection -- Physical--Chemical Functionalization I: Thermal and Plasma Nitriding -- Physical--Chemical Functionalization II: Ion Implantation -- Coating Techniques I: Electro-deposition -- Coating Techniques II: Chemical Vapor Deposition -- Coating Techniques III: Physical Vapor Deposition -- Applications of Surfaceengineering Processes in Micro-Manufacturing -- Advanced Surface Treatments for Micro-cutting Tools -- Anti-adhesion and Wear Resistance Coatings on Micro-molding Tools -- Micro-forming Tool Fabrication using Surface-engineering Processes -- Summary -- Acknowledgements -- References -- Chapter 15 - Polymer Thin Films - Processes, Parameters and Property Control -- Introduction -- Thin Films Obtained by Extrusion Coating -- Principle of Extrusion Coating -- Process Parameters and Influences -- Example: Adhesive Properties of an Aluminum/LDPE Structure -- Example: Sealing Properties of an Aluminum/LDPE Structure -- Summary on Extrusion Coating -- Organic Coatings Deposited in Solution -- Main Polymers used in Roll Coating -- Principle of Organic Coating Deposition in Solution -- Process Parameters and Influences -- Example: Optimizing Optical Properties -- Example: Barrier Properties -- Example: Sealing Properties -- Summary on Organic Coatings -- Vacuum-Deposited Coatings -- Principle of Vacuum Polymer Deposition.

Major Precursor Families.