Semiconductor Strain Metrology : Principles and Applications.
Title:
Semiconductor Strain Metrology : Principles and Applications.
Author:
Wong, Terence K.S.
ISBN:
9781608053599
Personal Author:
Edition:
1st ed.
Physical Description:
1 online resource (141 pages)
Contents:
01 Title.pdf -- 02 Cover Page -- 03 REVISED eBooks End User License Agreement-Website -- 04 Dedication -- 05 Content -- 06 Foreword -- 07 Preface -- 08 Part 01 -- 09 Chapter 01 -- 10 Chapter 02 -- 11 Part 2 -- 12 Chapter 03 -- 13 Chapter 04 -- 14 Chapter 05 -- 15 Part 03 -- 16 Chapter 06 -- 17 Chapter 07 -- 18 Chapter 08 -- 19 Part 04 -- 20 Chapter 09 -- 21 Chapter 10 -- 22 Chapter 11 -- 23 Conclusion and Outlook -- 24 Appendix -- 25 Index.
Abstract:
This book surveys the major and newly developed techniques for semiconductor strain metrology. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers.
Local Note:
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2017. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Genre:
Electronic Access:
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