Low-K Nanoporous Interdielectrics : Materials, Thin Film Fabrications, Structures and Properties.
Title:
Low-K Nanoporous Interdielectrics : Materials, Thin Film Fabrications, Structures and Properties.
Author:
Ree, Moonhor.
ISBN:
9781617283185
Personal Author:
Physical Description:
1 online resource (77 pages)
Series:
Nanotechnology Science and Technology
Contents:
LOW-K NANOPOROUS INTERDIELECTRICS: MATERIALS, THIN FILM FABRICATIONS, STRUCTURES AND PROPERTIES -- LOW-K NANOPOROUS INTERDIELECTRICS: MATERIALS, THIN FILM FABRICATIONS, STRUCTURES AND PROPERTIES -- CONTENTS -- PREFACE -- Chapter I INTRODUCTION -- Chapter II RECENT DEVELOPMENTS IN LOW-K NANOPOROUS DIELECTRICS -- II-1. HOLLOW NANOPARTICLES -- II-2. DENDRIMERS -- II-3. STAR-SHAPE POLYMERS -- II-4. HYPERBRANCHED POLYMERS -- II-5. CROSSLINKED POLYMER NANOPARTICLES -- II-6. CORE-CORONA POLYMER NANOPARTICLES -- II-7. LINEAR POLYMERS -- II-8. CAGE SUPRAMOLECULES -- II-9. HIGH BOILING POINT MOLECULES -- II-10. HYBRID COPOLYMERS -- Chapter III CHARACTERIZATION OF PORE STRUCTURES -- III-1. GIXS -- III-2. TRANSMISSION RADIATION SCATTERING -- III-3. MICROSCOPY -- III-4. POROSIMETRY -- III-5. SPECTROSCOPY -- III-6. COMPARITIVE STUDIES OF CHARACTERIZATION OF PORE STRUCTURE -- Chapter IV CONCLUSIONS -- REFERENCES -- INDEX -- Blank Page.
Local Note:
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2017. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
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