BEAM TECHNOLOGIES FOR INTEGRATED PROCESSING -- Copyright -- ABSTRACT -- PREFACE -- ACKNOWLEDGMENTS -- Contents -- 1 Introduction -- 2 SUMMARY AND RECOMMENDATIONS -- SUMMARY -- Electronic Materials -- Engineered Materials -- Integrated Processing -- RECOMMENDATIONS -- 3 BEAM TECHNOLOGIES -- ATOMIC AND MOLECULAR MATERIAL BEAMS -- Physical Vapor Deposition -- Direct Evaporation Processes -- Direct Reactive Evaporation Processes -- Direct Sputtering Processes -- Reactive Sputtering Processes -- Ion Beam Sputtering Processes -- Molecular Beam Epitaxy -- Chemical Vapor Deposition Processes -- Microwave Electron Cyclotron Resonance Plasmas -- Ion Beams -- Energy Beams -- Laser Beams -- Electron Beams -- X-Ray Lithography -- Microwave Beams -- REFERENCES -- 4 BEAM APPLICATIONS IN MICROELECTRONICS -- BEAM APPLICATIONS IN SEMICONDUCTOR DEVICE MANUFACTURE -- Silicon Integrated Circuits -- Beam Technologies For Materials Deposition -- Beam Technologies For Patterning -- Beam Technologies For Etching -- BEAM TECHNOLOGIES FOR COMPOUND SEMICONDUCTOR ICS -- Beam Technologies For Materials Deposition -- Beam Technologies For Heating -- OPTOELECTRONICS -- REFERENCES -- 5 BEAM APPLICATIONS IN ENGINEERED MATERIALS -- COATINGS -- Diamond, Diamond-Like Carbon, And Cubic Boron Nitride Coatings -- SURFACE MODIFICATION -- APPLICATIONS OF LASERS TO MATERIALS FORMING -- Shaping And Removal -- Desktop Deposition -- Joining -- POWDER PREPARATION -- COMPOSITES FABRICATION -- Fiber And Whisker Preparation -- Metal-Matrix Composites Fabrication -- Ceramic-Matrix Composites Fabrication -- NANOPHASE MATERIALS -- OPTICAL SURFACES AND DEVICES -- POLYMERS -- MATERIALS FOR ENERGY PRODUCTION -- BIOIMPLANT DEVICES -- REFERENCES -- 6 INTEGRATED PROCESSING -- INTEGRATED PROCESSING IN MICROELECTRONICS -- Integrated Processing For Integrated Circuits.

Traditional Integrated Circuit Processing Techniques -- Advances Toward Integrated Processing -- Integrated Processing Tools -- Applications For Integrated Processing Tools -- INTEGRATED PROCESSING FOR METALS AND CERAMICS -- Architectural Glass Coatings -- In-Line Dry Coating Process For Stainless Steel Sheet -- Mechanical Fabrication -- REFERENCES -- 7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION -- REFERENCE -- APPENDIX A ACRONYMS AND ABBREVIATIONS -- APPENDIX B BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS.