Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK
Title:
Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK
Author:
Gettering and Defect Engineering in Semiconductor Technology Conference (15th : 2013 : Oxford, England)
ISBN:
9783038262053
Physical Description:
1 online resource (513 pages) : illustrations.
Series:
Solid state phenomena ; 205-206
Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205-206.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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