Silicon processing for the VLSI era
Title:
Silicon processing for the VLSI era
Author:
Wolf, Stanley, 1943-
ISBN:
9780961672164
Personal Author:
Publication Information:
Sunset Beach, Calif. : Lattice Press, c2000- >
Physical Description:
v. <1- > : ill. ; 25 cm.
General Note:
JM20000323.
Contents:
v. 1. Process technology.
Added Author: