Plasma processing of semiconductors

Title:

Author:

NATO Advanced Study Institute on Plasma Processing of Semiconductors (1996 : Bonas, France)

ISBN:

9780792345671

Conference Author:

Physical Description:

x, 613 pages: illustrations ; 25 cm.

Series:

NATO ASI series. Series E., Applied sciences ; vol. 336

NATO ASI series. Series E, Applied sciences ; no. 336.

General Note:

"Proceedings of the NATO Advanced Study Institute on Plasma Processing of Semiconductors, Château de Bonas, France, 17-18-June, 1996"--T.p. verso.

"Published in cooperation with the NATO Scientific Affairs Division."

Subject Term:

Added Author:

Added Corporate Author:

Holds: Copies: