
New approaches to image processing based failure analysis of nano-scale ULSI devices
Title:
New approaches to image processing based failure analysis of nano-scale ULSI devices
Author:
Zalevsky, Zeev.
ISBN:
9780128000175
Personal Author:
Physical Description:
1 online resource (110 pages) : illustrations.
Series:
Micro & nano technologies series
Micro & nano technologies.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Genre:
Electronic Access:
Click to View