Silicon-on-insulator (soi) technology : manufacture and applications
Title:
Silicon-on-insulator (soi) technology : manufacture and applications
Author:
Kononchuk, Oleg, editor.
ISBN:
9780857099259
Physical Description:
1 online resource (502 pages).
Series:
Woodhead Publishing Series in Electronic and Optical Materials ; Number 58
Woodhead Publishing series in electronic and optical materials ; Number 58.
General Note:
Includes index.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Genre:
Electronic Access:
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