Advances in chemical mechanical planarization (CMP)
Title:
Advances in chemical mechanical planarization (CMP)
Author:
Babu, Suryadevara, editor.
ISBN:
9780081002186
Physical Description:
1 online resource (538 pages) : illustrations (some color).
Series:
Woodhead Publishing Series in Electronic and Optical Materials ; Number 86
Woodhead Publishing series in electronic and optical materials ; Number 86.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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Electronic Access:
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