Metal impurities in silicon-device fabrication
Title:
Metal impurities in silicon-device fabrication
Author:
Graff, Klaus, 1931- author.
ISBN:
9783642975936
Personal Author:
Physical Description:
1 online resource (227 pages) : illustrations.
Series:
Springer Series in Materials Science ; 24
Springer series in materials science ; 24.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Genre:
Electronic Access:
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