Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Title:
Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Author:
Deitz, Julia I.
Personal Author:
Publication Information:
Cambridge, MA MyJoVE Corp 2016
Physical Description:
online resource (470 seconds)
Series:
Engineering
General Note:
Title from resource description page
Abstract:
The use of electron channeling contrast imaging in a scanning electron microscope to characterize defects in III-V/Si heteroexpitaxial thin films is described. This method yields similar results to plan-view transmission electron microscopy, but in significantly less time due to lack of required sample preparation.
Reading Level:
For undergraduate, graduate, and professional students
Subject Term:
Electronic Access:
https://www.jove.com/t/52745