Handbook of cleaning for semiconductor manufacturing fundamentals and applications
Title:
Handbook of cleaning for semiconductor manufacturing fundamentals and applications
Author:
Reinhardt, Karen A.
Personal Author:
Publication Information:
Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., c2011.
Physical Description:
xxii, 590 p. : ill.
Genre:
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Electronic Access:
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