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Handbook of cleaning for semiconductor manufacturing : fundamentals and applications
Title:
Handbook of cleaning for semiconductor manufacturing : fundamentals and applications
Author:
Reinhardt, Karen A.
ISBN:
9781613441770

9781118071731

9780470625958

9781118071748

9781118099513

9781283374590

9786613374592
Personal Author:
Reinhardt, Karen A.
Publication Information:
Salem, Mass. ; Scrivener ; Hoboken, N.J. : John Wiley & Sons, Inc., ©2011.
Physical Description:
1 online resource (xxii, 590 pages) : illustrations
Series:
Wiley-Scrivener ; v.48

Wiley-Scrivener.
Local Note:
O'Reilly
Subject Term:
Semiconductors -- Surfaces -- Cleaning.

Surface preparation.

Semi-conducteurs -- Surfaces -- Nettoyage.

Traitement de surface.

TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors.

TECHNOLOGY & ENGINEERING -- Electronics -- Solid State.

Engineering. (OCoLC)fst00910312
Added Author:
Reidy, Richard F., 1960-
Electronic Access:
https://learning.oreilly.com/library/view/~/9781118099513
https://learning.oreilly.com/library/view/~/9781118099513/?ar
https://go.oreilly.com/library-access/library/view/-/9781118099513/?ar
Holds: Copies:

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