Fundamentals of microelectronics processing.
Title:
Fundamentals of microelectronics processing.
Author:
Lee, Hong H.
ISBN:
9780070370562
Personal Author:
Publication Information:
New York: McGraw-Hill, c1990.
Physical Description:
xiv, 514p.
Series:
McGaw-Hill Chemical Engineering Series
Series Title:
McGaw-Hill Chemical Engineering Series
General Note:
Includes bibliographical references and index.