Cover image for Materials science in microelectronics
Materials science in microelectronics
Title:
Materials science in microelectronics
Author:
Machlin, E. S.
ISBN:
9780080446394
Personal Author:
Edition:
2nd ed.
Publication Information:
Amsterdam ; Boston : Elsevier, 2005-
Physical Description:
v. <1 > ; 24 cm.
Contents:
v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films.
Abstract:
The subject matter of thin-films which play a key role in microelectronics divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following: Electrical properties Magnetic properties Optical properties Mechanical properties Mass transport properties Interface and junction properties Defects and properties * Captures the importance of thin films to microelectronic development * Examines the cause / effect relationship of structure on thin film properties.
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