Thin film coatings are used to provide protection to the substrate of interest against physical and chemical elements. Coating can also be applied to modify the surface properties of the substrate. One of the most important aspects of coating processes is controlling the thickness of coating material over the substrate. As a subset of a family of chemical vapor deposition methods, iCVD relies on vapor-to-surface reactions to form solid ultrathin polymer films. Unlike other CVD methods, iCVD is unique in that a polymerization reaction is induced by a thermally or chemically activated initiator molecule, much like in liquid-based thermal polymerization except without the use of a liquid solvent medium. The aim of the study is to fabricate polymeric protective nano-coatings via iCVD on flat surfaces at low or ambient temperatures. A variety of polymers, including homopolymers of glycidyl methacrylate (GMA), cyclo hexyl methacrylate (CHMA) and 1H, 1H, 2H, 2H,-Perfluorodecyl acrylate (PFDA) and P(GMA-PFDA) copolymers were fabricated via iCVD. The surface roughness and contact angle values were measured. Smooth hydrophobic surfaces having high contact angle (approximately 130˚) were obtained with PPFDA and PGMA-co-PPFDA thin films. Chemical compositions of the homo and co-polymer films were also evaluated confirming the retention of functional groups during polymerization, thus opening possibility of using iCVD produced films in various sensor applications.