Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
Title:
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
Author:
Bhattacharyya, Bijoy, author.
ISBN:
9780323352888
Personal Author:
Physical Description:
1 online resource (297 pages) : illustrations, graphs.
Series:
Micro & Nano Technologies Series
Micro & nano technologies.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Genre:
Electronic Access:
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