Glow discharge processes;sputtering and plasma etching

Title:

Author:

Chapman, Brian.

ISBN:

9780471078289

Personal Author:

Publication Information:

New York: John Wiley, c1980

Physical Description:

xv, 406 p. : ill.; 24 cm.

Subject Term:

Holds: Copies:

Library	Material Type	Item Barcode	Shelf Number	Status
Searching... IYTE Library	Book	B013402	QC702.7.P6C48 1980 C.2	Searching... Unknown
Searching... IYTE Library	Book	0006856	QC702.7.P6C48 1980 C.1	Searching... Unknown