Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems
Title:
Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems
Author:
Feldman, Martin.
ISBN:
9780857098757
Physical Description:
1 online resource (599 pages) : illustrations.
Series:
Woodhead Publishing series in electronic and optical materials, number 42
Woodhead Publishing series in electronic and optical materials ; no. 42.
Local Note:
Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
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Electronic Access:
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