Cover -- Contents -- List of Contributors -- Chapter 1 Overview of Chemically Vapor Deposited (CVD) Polymers -- 1.1 Motivation and Characteristics -- 1.1.1 Quality -- 1.1.2 Conformality -- 1.1.3 Durability -- 1.1.4 Composition -- 1.2 Fundamentals and Mechanisms -- 1.2.1 Gas Phase and Surface Reactions -- 1.2.2 The Monomer Saturation Ratio -- 1.2.3 Process Simplification and Substrate Independence -- 1.3 Scale-Up and Commercialization -- 1.4 Process and Materials Chemistry -- 1.4.1 Initiated CVD (iCVD) and Its Variants -- 1.4.2 Plasma Enhanced CVD (PECVD) -- 1.4.3 Poly(p-xylylene) (PPX) and Its Derivatives ("Parylenes") -- 1.4.4 Oxidative CVD (oCVD) -- 1.4.5 Vapor Deposition Polymerization (VDP) and Molecular Layer Deposition (MLD) -- 1.4.6 Additional Methods -- 1.5 Summary -- Acknowledgments -- References -- Part I: Fundamentals -- Chapter 2 Growth Mechanism, Kinetics, and Molecular Weight -- 2.1 Introduction -- 2.2 iCVD Process -- 2.3 Kinetics and Growth Mechanism -- 2.3.1 Fluorocarbon Polymers -- 2.3.2 Organosilicon Polymers -- 2.3.3 Acrylate and Methacrylate Polymers -- 2.3.4 Styrene and Other Vinyl Polymers -- 2.3.5 Ring Opening Polymers -- 2.4 Summary -- References -- Chapter 3 Copolymerization and Crosslinking -- 3.1 Introduction -- 3.2 Copolymer Composition and Structure -- 3.2.1 Confirmation of iCVD Copolymerization -- 3.2.2 Analysis of Copolymer Composition -- 3.2.3 Compositional Gradient -- 3.3 Copolymerization Kinetics -- 3.3.1 Copolymerization Equation and Reactivity Ratio -- 3.3.2 Types of iCVD Copolymerization -- 3.4 Tunable Properties of iCVD Copolymers -- 3.4.1 Mechanical Properties -- 3.4.2 Swelling -- 3.4.3 Thermal Properties -- 3.4.4 Surface Properties -- 3.5 Conclusions -- References -- Chapter 4 Non-Thermal Initiation Strategies and Grafting -- 4.1 Introduction -- 4.2 Initiation Strategies.

4.2.1 Plasma Initiation Strategies -- 4.2.1.1 Plasma Enhanced Chemical Vapor Deposition (PECVD) -- 4.2.1.2 Pulsed-Plasma Enhanced Chemical Vapor Deposition (PPECVD) -- 4.2.1.3 Microwave Plasmas -- 4.2.1.4 Initiated Plasma Enhanced Chemical Vapor Deposition (iPECVD) -- 4.2.1.5 Plasma Initiation Summary -- 4.2.2 Photoinitiation Strategies -- 4.2.2.1 Photoactive Initiator Molecules -- 4.2.2.2 Photoactive Monomer Species -- 4.2.2.3 Photoinitiation Summary -- 4.3 Grafting -- 4.3.1 Surface Modification of Organic Substrates -- 4.3.2 Surface Modification of Inorganic Substrates -- 4.3.3 Grafting Summary -- 4.4 Summary -- References -- Chapter 5 Conformal Polymer CVD -- 5.1 Introduction -- 5.2 Vapor Phase Transport -- 5.3 Conformal Polymer Coating Applications -- 5.4 Conformal Polymer Coating Technologies -- 5.5 Gas and Surface Reactions -- 5.6 The Reaction-Diffusion Model -- 5.6.1 Reaction and Diffusion in a Pore -- 5.6.2 Initiator Controlled Consumption -- 5.6.3 Factors Affecting the Initiator Sticking Probability -- 5.6.4 Monomer Controlled Consumption -- 5.6.5 Other Polymer CVD Systems -- 5.7 Applications -- 5.8 Conclusion -- Acknowledgment -- References -- Chapter 6 Plasma Enhanced-Chemical Vapor Deposited Polymers: Plasma Phase Reactions, Plasma-Surface Interactions, and Film Properties -- 6.1 Introduction: Chemical Vapor Deposition Methods, Advantages, and Challenges -- 6.2 Plasma Parameters, Plasma Phase Reactions, and the Role of Diagnostics -- 6.3 Plasma Polymerization: Is It Just Chemistry? The Role of Ions in Film Growth -- 6.4 Considerations on the Macroscopic Kinetics Approach to Plasma Polymerization -- 6.5 Polymer Film Characteristics -- 6.5.1 Plasma Polymer Chemistry: From Precursor Fragmentation to Retention -- 6.5.2 Densification of the Film Micro-structure -- 6.5.3 Plasma Polymer Topography -- Acknowledgments.

References -- Chapter 7 Fabrication of Organic Interfacial Layers by Molecular Layer Deposition: Present Status and Future Opportunities -- 7.1 Introduction -- 7.2 MLD Coupling Chemistry -- 7.2.1 Pure Organic MLD -- 7.2.1.1 Polyamide -- 7.2.1.2 Polyimide -- 7.2.1.3 Polyurea -- 7.2.1.4 Polythiourea -- 7.2.1.5 Polyurethane -- 7.2.1.6 Polyazomethine -- 7.2.1.7 Polyester -- 7.2.2 Organic-Inorganic Hybrid MLD -- 7.2.2.1 Organic-Inorganic Hybrid MLD with Homo-Bifunctional Precursors -- 7.2.2.2 Organic-Inorganic Hybrid MLD with Hetero-Bifunctional Precursors -- 7.3 Applications of MLD Films -- 7.3.1 Applications of Pure Organic MLD Films -- 7.3.1.1 Organic Quantum Dots with Tunable Sizes and Bandgaps -- 7.3.1.2 Organic Films as Copper Diffusion Barrier -- 7.3.1.3 Organic Polyurea MLD Film as Photoresist -- 7.3.1.4 Organic Polyimide MLD Film with Switchable Conductivity -- 7.3.2 Applications of Organic-Inorganic Hybrid MLD Films -- 7.3.2.1 Zeolite Modification Using Aluminum Alkoxide MLD Films -- 7.3.2.2 Polymer Modification Using Aluminum Alkoxide MLD Films -- 7.3.2.3 Encapsulation of Cu Nanoparticles Using Aluminum Alkoxide MLD Films -- 7.3.2.4 Photocatalytic Layers Using Titanium Alkoxide MLD Films -- 7.3.2.5 Organic Magnetic Materials Using Vanadium-Tetracyanoethylene Films -- 7.3.2.6 Electronic Device Applications -- 7.4 Study of MLD Film Structure -- 7.5 Challenges and Opportunities for MLD -- 7.6 Conclusions -- Acknowledgments -- References -- Part II: Materials Chemistry -- Chapter 8 Reactive and Stimuli-Responsive Polymer Thin Films -- 8.1 Introduction -- 8.2 Reactive Polymer Thin Films -- 8.2.1 Motivation -- 8.2.2 Examples of Functionalization Reactions -- 8.2.3 Important CVD Capabilities -- 8.2.4 Applications of Reactive Films -- 8.2.4.1 Bioconjugation -- 8.2.4.2 Nonfouling Surface -- 8.2.4.3 Sensors.

8.2.4.4 Adhesive Bonding of Microfluidics -- 8.3 Responsive Polymer Thin Films -- 8.3.1 Chemical-Responsive Polymers -- 8.3.2 pH Responsive Polymers -- 8.3.3 Temperature-Responsive Polymers -- 8.3.4 Piezoelectric Polymers -- 8.4 Conclusions -- References -- Chapter 9 Multifunctional Reactive Polymer Coatings -- 9.1 Introduction -- 9.2 CVD Copolymer Coatings with Randomly Distributed Functional Groups -- 9.3 Multifunctional Gradient Coatings -- 9.3.1 Composition Gradient Preparation and Biomedical Applications -- 9.3.2 Formation of Steep Surface Gradient -- 9.4 Functional Coatings with Micro- and Nanopatterns -- 9.4.1 Microcontact Printing (μCP) -- 9.4.2 Photopatterning -- 9.4.3 Vapor-Assisted Patterning During CVD -- 9.4.4 Nanopatterning by Dip-Pen Lithography (DPN) -- 9.5 Summary and Future Outlook -- Acknowledgments -- References -- Chapter 10 CVD Fluoropolymers -- 10.1 Introduction -- 10.2 Polytetrafluoroethylene (PTFE) -- 10.3 Poly(vinylidene fluoride) (PVDF) -- 10.4 Poly(1H,1H,2H,2H-perfluorodecyl acrylate) [p(PFDA)] -- 10.5 Copolymerization of Fluorinated Monomers -- 10.5.1 Copolymers with 1H,1H,2H,2H-perfluorodecyl acrylate (PFDA) -- 10.5.2 Copolymers with Organosilicons -- 10.6 Summary -- References -- Chapter 11 Conjugated CVD Polymers: Conductors and Semiconductors -- 11.1 Overview -- 11.2 Reactors and Process -- 11.3 Chemistry and Mechanism -- 11.3.1 Monomers -- 11.3.2 Oxidants and Dopants -- 11.4 Grafting and Patterning -- 11.5 Conformality -- 11.6 Dopants, Rinsing, Stability -- 11.7 Semiconductors -- 11.8 Electrical Properties -- 11.9 Functional oCVD Copolymers -- 11.10 Concluding Remarks -- References -- Part III: Applications -- Chapter 12 Controlling Wetting with Oblique Angle Vapor-Deposited Parylene -- 12.1 Introduction -- 12.2 Definition of Anisotropy in Materials Science.

12.3 OAP Surfaces: Fabrication -- 12.4 Directional OAP Surfaces: Form and Function -- 12.5 Modeling Adhesion, Wetting, and Transport on Directional Surfaces -- 12.5.1 Modeling Dry Adhesion -- 12.5.2 Modeling Wetting, Adhesion, and Transport in Solid-Fluid Systems -- 12.5.2.1 Analytic Models of Contact Angle Hysteresis -- 12.5.2.2 Analytic Models of Drop Transport on Textured Surfaces -- 12.5.2.3 Finite Element Models of Static Drops on Textured Surfaces -- 12.5.2.4 Full Numerical Simulation of Fluid Flow and Free Surface on Directional Surfaces -- 12.6 Conclusions -- Acknowledgments -- References -- Chapter 13 Membrane Modification by CVD Polymers -- 13.1 Modification of Membrane Surface and Internal Pores -- 13.1.1 Conformal Coatings for Membrane Surface Modification -- 13.1.2 Nonconformal Coatings for Membrane Surface Modification -- 13.2 Membrane Surface Energy Control Via Thin-Film Coatings -- 13.2.1 Hydrophobic Thin-Film Coatings for Membranes -- 13.2.2 Hydrophilic Thin-Film Coatings for Membranes -- 13.3 Antifouling and Antimicrobial Coatings for Membranes -- 13.4 Membrane Modification for Sustainability -- References -- Chapter 14 CVD Polymer Surfaces for Biotechnology and Biomedicine -- 14.1 Introduction -- 14.2 Biosensors -- 14.3 Controlled Drug Release -- 14.4 Tissue Engineering -- 14.5 Bio-MEMS -- 14.6 Biopassivating Coatings -- 14.7 Antimicrobial Coatings -- 14.8 Significance and Future Directions -- References -- Chapter 15 Encapsulation, Templating, and Patterning with Functional Polymers -- 15.1 Introduction -- 15.2 Encapsulation of 1D and 2D Structures with Functional Polymers -- 15.2.1 Encapsulation of Carbon Nanotubes (CNTs) -- 15.2.2 Encapsulation of Micro/Nanostructures -- 15.3 Patterning of Surfaces -- 15.3.1 Patterning of Multifunctional Surfaces -- 15.3.2 Surface Wrinkling.

15.4 Synthesis of Polymeric Micro/Nanostructures.