Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Title:
Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Author:
Goktas, Hasan
Personal Author:
Publication Information:
Cambridge, MA MyJoVE Corp 2016
Physical Description:
online resource (925 seconds)
Series:
Engineering
General Note:
Title from resource description page
Abstract:
A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.
Reading Level:
For undergraduate, graduate, and professional students
Subject Term:
Electronic Access:
https://www.jove.com/t/56371