CONTENTS -- Dedication -- Introduction to the Beam Business Robert W. Hamm and Marianne E. Hamm -- Chapter 1. Ion Implantation for Fabrication of Semiconductor Devices and Materials Michael I. Current -- 1. Introduction -- 2. Applications of Ion Implantation: Devices and Materials -- 2.1 Pre-amorphization -- 2.2 Cocktail implants -- 2.3 Carbon implants for tensile strained nMOS -- 2.4 Oxygen implants for direct formation of Silicon-on-Insulator (SOI) wafers -- 2.5 Hydrogen implants for formation of SOI wafers by layer transfer -- 3. Accelerator Designs -- 3.1 Beamline system types -- 3.2 Accel-decel beamlines -- 3.3 MeV beamlines -- 3.4 Plasma immersion and ion shower implanters -- 3.5 SIMOX high-current, high-temperature implanters -- 4. Ion Source Designs -- 4.1 Special ion sources: SIMOX, molecular ions, non-volatile elements, and large-area beams -- 5. Scanning Methods -- 5.1 Beam deflection and wafer motion in orthogonal directions -- 5.2 Spinning wheel and pendulum wafer scanning -- 6. New Directions: Gas Cluster Ions, Photovoltaic Cell Doping, and MeV Protons for Si Membrane Cutting -- 6.1 Gas cluster ions -- 6.2 Doping of Si-based photovoltaic cells -- 6.2.1 Alternatives to implant doping for PV cells -- 6.2.2 Advanced PV cells -- 6.3 High-current, multi-MeV proton beams for fabrication of thin Si PV membranes -- 7. Implantation into Metals and Biomaterials -- 7.1 Metals: hardness, friction, and corrosion -- 7.2 Biomaterials treated by plasma immersion implantation and deposition -- 8. Summary -- Acknowledgements -- References -- Chapter 2. Electron Beam Materials Processing Donald E. Powers -- 1. Introduction -- 2. Electron Beam Equipment -- 3. Electron Beam Welding -- 3.1 Large steam turbines -- 3.2 High efficiency impellers -- 3.3 Speed gears -- 3.4 Drive rings -- 4. EB Cutting and Drilling -- 5. EB Heat Treating.

6. EB Melting and Casting -- 7. Summary and Future Trends -- Acknowledgements -- References -- Chapter 3. Electron Beam Materials Irradiators Marshall R. Cleland -- 1. Introduction -- 2. Physical Properties of High-Energy Electrons and X-Rays -- 2.1 High-energy electrons -- 2.2 High-energy X-rays -- 2.3 Radiation dosimetry -- 2.4 Dose versus electron beam power -- 2.5 Dose versus electron beam current -- 3. Industrial Electron Accelerators -- 3.1 Low-energy accelerators -- 3.2 Medium-energy accelerators -- 3.3 High-energy accelerators -- 4. Major Applications of Industrial EB Irradiators -- 4.1 Cross-linking of materials -- 4.1.1 Wire and cable insulation -- 4.1.2 Heat-shrinkable plastic tubing and film -- 4.1.3 Curing of inks, coatings, and adhesives -- 4.1.4 Automobile tires -- 4.1.5 Polyethylene foam -- 4.2 Radiation sterilization of medical devices -- 4.3 Irradiation of foods -- 5. Other EB Irradiation Applications -- 5.1 Treatment of waste materials -- 5.2 Cleaning of stack gases -- 5.3 Curing of composite materials -- 5.4 Silicon-carbide fiber manufacturing -- 5.5 Production of fuel cells -- 5.6 Cross-linking of PTFE and rubber sheeting -- 5.7 Seed and soil disinfestation -- 5.8 Human tissue sterilization -- 5.9 Direct food contact coatings -- 6. Summary -- Acknowledgements -- References -- Chapter 4. Accelerator Production of Radionuclides David J. Schlyer and Thomas J. Ruth -- 1. Introduction -- 2. Applications of Radionuclides -- 2.1 Radiotracers -- 2.2 Nuclear medicine imaging -- 2.3 Therapeutic and other medical applications -- 2.3.1 Brachytherapy -- 2.3.2 Targeted radiotherapy -- 2.3.3 Other medical applications -- 2.4 Industrial -- 3. Accelerators for Radionuclide Production -- 3.1 Cyclotrons -- 3.1.1 Ion source -- 3.1.2 Ion injection -- 3.1.3 Beam extraction -- 3.1.4 Beam transport -- 3.1.5 Targets.

3.1.6 Radiation shielding and facilities requirements -- 3.2 Linear accelerators -- 3.3 Choice of accelerator -- 4. General Principles of Radionuclide Production -- 4.1 Nuclear reactions -- 4.1.1 Coulomb barrier -- 4.1.2 Reaction models -- 4.1.3 Q value and threshold energy -- 4.1.4 Cross section -- 4.2 Optimizing production -- 4.2.1 Production rate -- 4.2.2 Saturation factors -- 4.2.3 Specific activity -- 5. Accelerator Targetry -- 5.1 Stopping power and energy loss -- 5.2 Energy straggling -- 5.3 Small angle multiple scattering -- 5.4 Beam heating and density reduction -- 5.5 Ionization of target materials -- 5.6 Radiation damage and activation -- 5.7 Chemical reactions -- 5.8 Pressure increases -- 5.9 Beam focusing -- 6. Conclusions and Future Directions -- References -- Chapter 5. Industrial Aspects of Ion Beam Analysis Ragnar Hellborg and Harry J. Whitlow -- 1. Ion Beam Analysis in Industry -- 2. Accelerators for IBA -- 3. Quantity Analysis -- 3.1 Introductory remarks -- 3.2 PIXE technique -- 3.3 PIGE technique -- 3.4 Accelerator Mass Spectrometry (AMS) -- 4. Depth Profiling Methods -- 4.1 Introductory remarks -- 4.2 Fundamentals of RBS and ERDA measurements -- 4.3 Basis of the quantitative analysis in ERDA and RBS -- 4.4 Rutherford Backscattering Spectrometry (RBS) -- 4.4.1 Determination of the thickness of the TiO2 film -- 4.4.2 Determination of the composition of the titanium oxide film -- 4.4.3 Analysis of complex RBS spectra -- 4.5 Elastic Recoil Detection Analysis (ERDA) -- 4.6 Nuclear reaction analysis (NRA) -- 4.7 Charged particle activation analysis (CPAA) -- 5. Industrial Facilities for Ion Beam Analysis -- Acknowledgements -- References -- Chapter 6. Production and Applications of Neutrons Using Particle Accelerators David L. Chichester -- 1. Introduction -- 2. Neutron Production -- 2.1 Ion reactions -- 2.1.1 2H+2H 3He+n.

2.1.2 2H+3H 4He+n -- 2.1.3 1H+7Li 7Be+n -- 2.1.4 2H+7Li 8Be+n -- 2.1.5 1H+9Be 9B+n -- 2.1.6 2H+9Be 10B+n -- 2.1.7 Other two-body ion reactions -- 2.2 Reactions using photons -- 3. Industrial Neutron Production Accelerators -- 3.1 Open-vacuumsystems -- 3.2 Sealed-tube systems -- 3.2.1 History -- 3.2.2 Industrial sealed-tube ENGs -- 3.2.3 Long-lived DD neutron generator design considerations -- 3.3 Photoneutron systems -- 3.4 Other electronic neutron sources -- 4. Industrial Applications -- 4.1 Neutron interactions -- 4.2 Geophysical exploration -- 4.3 Gauging and radiography -- 4.4 Laboratory activation analysis -- 4.5 Biomedical applications -- 4.6 Bulkmaterial analysis -- 4.7 Radiation effects testing -- 4.8 Detection of contraband, high explosives, and chemical weapon agents -- 4.9 Fissionable material analysis for safeguards -- 4.10 Fissionable material detection for screening and security -- 4.11 Other applications -- 5. Summary and Future Trends -- Acknowledgements -- Disclaimer -- References -- Chapter 7. Nondestructive Testing and Inspection Using Electron Linacs William A. Reed -- 1. Introduction -- 1.1 History of X-rays for NDT -- 1.2 X-ray tubes vs. electron linacs -- 2. Market Overview -- 2.1 Computed tomography -- 2.2 Metrology and reverse engineering -- 2.3 Hazardous waste identification -- 2.4 Portable inspection applications -- 2.5 Isotope replacement -- 2.6 Homeland security -- 2.7 Air cargo -- 3. NDT Electron Linac Technology -- 3.1 NDT accelerator basics -- 3.2 Major subsystems -- 3.3 Beam properties -- 3.3.1 Radiation leakage -- 3.3.2 Energy spectrum -- 3.3.3 Beam flatness -- 3.3.4 Beam symmetry -- 3.3.5 Focal spot size -- 3.3.6 Collimation -- 4. Digital Detectors -- 4.1 High energy digital detectors -- 4.2 Detector performance -- 5. Traditional Radiographic Testing and Inspection Applications.

5.1 The radiographic inspection facility -- 5.2 Radiographic principles -- 5.3 Radiographic procedures -- 5.3.1 Radiography of castings -- 5.3.2 Radiography of welds -- 5.3.3 Radiography of assemblies -- 5.3.4 Radiography of rocket motors -- 6. Security Inspection Applications -- 6.1 X-ray cargo inspection -- 6.2 Recent innovations -- 6.2.1 Interlaced dual-energy accelerators -- 6.2.2 Advanced detector technology -- 6.2.3 More powerful software -- 6.3 X-ray cargo screening trends -- 7. High Energy Industrial CT Applications -- 7.1 Engineering and design applications -- 7.2 Production environment -- 8. Quality Standards andMeasurements -- 8.1 Half-value layer energy measurements -- 8.2 Cargo and vehicle screening standards -- 8.3 Digital data standardization -- 9. Summary -- Acknowledgements -- References -- Chapter 8. Industrial Use of Synchrotron Radiation: Love at Second Sight Josef Hormes and Jeffrey Warner -- 1. Introduction -- 2. Synchrotron Radiation: History and Properties -- SR-based Techniques for Industrial Applications -- 4. Synchrotron Radiation for Quality Control and the Control of Regulatory Requirements -- 4.1 Quality control -- 4.2 Control of regulatory requirements -- 4.2.1 Workplace aerosols -- 4.2.2 Tailings management -- 5. Synchrotron Radiation for Production -- 5.1 X-ray lithography for the fabrication of microelectronic devices -- 5.2 Deep etch X-ray lithography and microfabrication -- 6. Synchrotron Radiation for Research and Development -- 6.1 Biotechnology, pharmaceuticals, and cosmetics -- 6.1.1 Cosmetics and the human hair -- 6.1.2 Metals containing drugs -- 6.1.3 Protein crystallography -- 6.2 Automotive -- 6.2.1 Automotive catalysts for emission control -- 6.2.2 Rubber research -- 6.3 Mining -- 7. Concluding Remarks -- References -- Index.