Cover -- Title Page -- Copyright -- Contents -- About the Editors -- List of Contributors -- Series Preface -- Preface -- Chapter 1 What is a Nanoimprint? -- References -- Chapter 2 Nanoimprint Lithography: Background and Related Techniques -- 2.1 History of Material Processing: Polymer Processing -- 2.2 Products with Microstructure and Nanostructure -- 2.3 Technology for Making Micro- and Nanostructures -- References -- Chapter 3 Nanopattern Transfer Technology of Thermoplastic Materials -- 3.1 Behavior of Thermoplastic Materials -- 3.1.1 Thermoplastics -- 3.1.2 Basis of Viscoelasticity and Rheology -- 3.1.3 Measurement of Rheology -- 3.1.4 Physical Properties of Viscoelastic Materials and the Temperature-Time Superposition Principle -- 3.1.5 Materials Design for Realizing Nanoimprints -- 3.2 Applicable Processes Used for Nanopattern Transfer -- 3.2.1 Introduction of Injection Molding Process -- 3.2.2 Problems of the Injection Molding Process -- 3.2.3 Advantages of the Thermal Imprinting Process -- 3.3 Pattern Transfer Mechanism of Thermal Cycle NIL -- 3.3.1 Introduction of Thermal Imprinting Process -- 3.3.2 In-situ Observation of Thermal Imprinting Process -- 3.3.3 Offline Measurement of Replication Process in Thermal Cycle NIL -- 3.4 Modeling of Nanopattern Transfer -- 3.4.1 Importance of Viscosity in Thermal Imprinting Process -- 3.4.2 Mathematical Treatment in Injection Molding and Thermal Imprinting Process -- 3.4.3 Process Simulation in Micro- and Nanopattern Transfer -- References -- Chapter 4 Mold Fabrication Process -- 4.1 Ultra Precision Cutting Techniques Applied to Metal Molds Fabrication for Nanoimprint Lithography -- 4.1.1 Introduction -- 4.1.2 Cutting of Fine Groove Shape -- 4.1.3 Method of Cutting Groove -- 4.1.4 Precision Cutting of Cylindrical Material.

4.1.5 High-speed, Ultra Precision Machining System -- 4.1.6 Fine Pattern Processing by Bit Map Data -- 4.1.7 Machining of Dot Pattern Array -- 4.1.8 Improvement Points of the System -- 4.1.9 Summary -- 4.2 Nanoimprint Mold Fabrication Using Photomask Technology -- 4.2.1 Introduction -- 4.2.2 Summary of Mold Manufacturing Process -- 4.2.3 Pattern Writing Technique -- 4.2.4 Dry Etching -- 4.2.5 Examples of Fabricated Mold -- 4.2.6 Summary -- References -- Chapter 5 Ultraviolet Nanoimprint Lithography -- 5.1 Orientation and Background of UV-NIL -- 5.2 Transfer Mechanism of UV-NIL -- 5.2.1 Viscosity and Capillary Force -- 5.2.2 Release Coating and Evaluation of Release Properties -- 5.2.3 Release Coating Effect -- 5.3 UV-NIL Materials and Equipment -- 5.3.1 Ubiquitous NIL Machines -- 5.3.2 UV Nanoimprint Process Tool -- 5.3.3 UV-photocurable Resin -- 5.3.4 Fluorinated Polymers for UV-NIL -- 5.3.5 Cationic Curable Resins for UV-NIL -- 5.3.6 Molding Agents for Nanoimprinting -- 5.4 Evaluation Method -- 5.4.1 Macro Evaluation Technique of Nanoscale Pattern Shape and Evaluation Device -- 5.4.2 Characterization of Photocurable Resin for UV Nanoimprint -- References -- Chapter 6 Applications and Leading-Edge Technology -- 6.1 Advanced Nanoimprinting Technologies -- 6.1.1 Resolution Limit of Nanoimprint Lithography -- 6.1.2 Improved Nanoimprinting Technologies -- 6.1.3 Roll-to-Roll Nanoimprinting Technologies -- 6.2 Applications -- 6.2.1 Seamless Pattern -- 6.2.2 Multistep Cu Interconnection -- 6.2.3 GaN Nanostructures for High-Intensity LED.

6.3 High-Accuracy Nanoimprint Technology, Development of Micropatterning Method, and Automatic Process Control Using Batch Press Type, Step and Repeat Type Nanoimprint Machine -- 6.3.1 Introduction -- 6.3.2 Thermal Imprint -- 6.3.3 Summary -- 6.4 Micro/Nano Melt Transcription Molding Process -- 6.4.1 Outline of the Melt Transcription Molding Process -- 6.4.2 High Transcriptability -- 6.4.3 Excellent Optical Properties -- 6.4.4 Melt Transcription Molding System ``MTM100-15'' -- 6.5 Future Trends -- References -- Index.