Chemical vapour deposition precursors, processes and applications
Title:
Chemical vapour deposition precursors, processes and applications
Author:
Jones, Anthony C.
ISBN:
9781847558794
Publication Information:
Cambridge, UK : Royal Society of Chemistry, c2009.
Physical Description:
xv, 582 p. : ill., plans ; 26 cm.
Subject Term:
Genre:
Added Corporate Author:
Electronic Access:
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