Next Generation Micro/Nano Systems -- Preface and Committees -- Table of Contents -- Chapter 1: Physical, Chemical and Optical MEMS -- History and Recent Progress of MEMS Physical Sensors -- Continuous Process for Large-Area Flexible MEMS -- Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes -- Micromachined Devices for Use in Terahertz Applications -- Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon -- Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method -- Modeling of Piezo-Actuated Stick-Slip Micro-Drives: An Overview -- Foreign Bodies - The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems -- Chapter 2: Radiofrequency MEMS -- Integrated Microsystems -- RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems -- Functional RF Devices Powered by MEMS Technologies -- Chapter 3: Micro(Nano) Fluidics -- Microfluidic Microchemomechanical Systems -- Hydrogel-Based Microfluidic Systems -- Super-Hydrophilic PDMS and PET Surfaces for Microfluidic Devices -- New Viscosity Data for CuO-Water Nanofluid - The Hysteresis Phenomenon Revisited -- Keywords Index -- Authors Index.