Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering
Title:
Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering
Author:
Lyshevski, Sergey Edward.
ISBN:
9780849328381
Personal Author:
Edition:
2nd ed.
Publication Information:
Boca Raton, Fla. : CRC Press, c2005.
Physical Description:
722 p. : ill. ; 26 cm.
Series:
Nano- and microscience, engineering, technology, and medicine series ; 8
Series Title:
Nano- and microscience, engineering, technology, and medicine series ; 8
Electronic Access:
Publisher description http://www.loc.gov/catdir/enhancements/fy0647/2004057931-d.html