Cover image for Ion Implantation
Ion Implantation
Title:
Ion Implantation
Author:
Mark Goorsky
ISBN:
1881

9789535142928

9789535106340
Personal Author:
Publication Information:
IntechOpen 2012
Physical Description:
1 electronic resource (450 p.)
Abstract:
Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.
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