Nanofabrication using focused ion and electron beams principles and applications
Title:
Nanofabrication using focused ion and electron beams principles and applications
Author:
Utke, Ivo.
Publication Information:
Oxford ; New York : Oxford University Press, 2011.
Physical Description:
xvi, 813 p.
Series:
Nanomanufacturing series ; v. 1
Genre:
Added Corporate Author:
Electronic Access:
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