Cover -- Title Page -- Copyright -- Contents -- Preface -- Chapter 1: Fabrication of Microelectrodes Using Original "Soft Lithography" Processes -- 1.1. Introduction -- 1.2. Materials and methods -- 1.2.1. Selective peeling -- 1.2.2. Localized passivation -- 1.3. Selective peeling process development and results -- 1.4. Localized passivation process development and results -- 1.5. Conclusions -- 1.6. Bibliography -- Chapter 2: Love Wave Characterization of Mesoporous Titania Films -- 2.1. Introduction -- 2.2. Love wave platform -- 2.3. Mesoporous materials -- 2.4. Environmental ellipsometric porosimetry -- 2.4.1. Measurement principle -- 2.4.2. Sorption isotherm -- 2.5. Experimental set-up -- 2.5.1. Mesoporous sensitive layer deposition -- 2.5.2. Test bench -- 2.5.3. Results -- 2.5.3.1. Ellipsometric measurements -- 2.5.3.2. Acoustic measurements -- 2.6. Numerical simulations -- 2.6.1. Love wave propagation numerical model -- 2.6.2. Simulation of sensor frequency response -- 2.6.3. Extraction of shear modulus of the TiO2 film -- 2.7. Causes of mechanical stress induced by humidity sorption -- 2.7.1. Capillary contraction -- 2.7.2. Swelling and residual sol-gel stress -- 2.8. Conclusions -- 2.9. Bibliography -- Chapter 3: Immunosensing with Surface Acoustic Wave Sensors: Toward Highly Sensitive and Selective Improved Piezoelectric Biosensors -- 3.1. Introduction -- 3.2. SAW sensors and measurement systems -- 3.2.1. SAW transducers -- 3.2.2. Measurement instrumentation -- 3.2.3. An example of SAW device and conditioning system -- 3.2.4. SAW immunosensors' potential and their possible improvement -- 3.2.4.1. Antigen-antibody (Ag-Ab) selective recognition -- 3.2.4.2. Experimental estimation of kinetic rates -- 3.2.4.3. SAW sensor's improvements -- 3.3. Immunosensing applications to evaluate SAW device performances.

3.4. Survey of clinical applications of SAW immunosensor systems -- 3.4.1. Cardiac biomarker detection -- 3.4.2. Bacterial detection -- 3.4.3. Cell detection -- 3.4.4. Virus detection -- 3.4.5. Cocaine detection -- 3.5. Conclusion -- 3.6. Bibliography -- Chapter 4: AC Nanocalorimeter on Self-standing Parylene Membrane -- 4.1. Introduction -- 4.2. Advantage of this type of microdevice -- 4.2.1. The samples -- 4.2.2. Measurement method: the AC calorimetry [SUL 68] -- 4.3. Nanocalorimeter for measuring nano objects -- 4.3.1. The parylene membrane -- 4.3.2. Thermometer and heater in NbNx -- 4.3.3. Manufacturing -- 4.3.4. Sample placement -- 4.4. Device performances -- 4.4.1. Temperature calibration -- 4.4.2. Thermal conductance of the empty cell -- 4.4.3. Dynamic characterization of an empty calorimetric cell -- 4.4.4. Heat capacity of an empty calorimetric cell -- 4.4.5. Heat capacity of a GdAl2 microcrystal -- 4.5. Conclusion -- 4.6. Acknowledgments -- 4.7. Bibliography -- Chapter 5: Oscillatory Failure Detection in the Flight Control System of a Civil Aircraft Using Soft Sensors -- 5.1. Introduction -- 5.2. Modeling of the studied system -- 5.3. Design of a soft sensor for the oscillatory failure detection -- 5.4. Fault detection by standard deviation test -- 5.4.1. Residual generation -- 5.4.2. Generation of failure indicators -- 5.4.3. Failure detection by standard deviation test -- 5.4.4. Discussion on failure detection by standard deviation test -- 5.5. Fault detection by correlation test -- 5.5.1. Pattern generation -- 5.5.1.1. Patterns of liquid failures -- 5.5.1.2. Patterns of solid failures -- 5.5.2. Failure indicator generation and fault detection by correlation test -- 5.5.3. Discussion on the failure detection by correlation test -- 5.6. Conclusion -- 5.7. Acknowledgments -- 5.8. Bibliography.

Chapter 6: Embedded Sensors for the Analysis of Drivers' Behavior -- 6.1. Introduction -- 6.2. Trajectories' observatory -- 6.2.1. Trajectory -- 6.2.2. The measurement -- 6.2.3. Bragg fibers -- 6.2.4. Resistive sensors -- 6.2.5. Electromagnetic loops -- 6.3. The sensors' network -- 6.3.1. Spacing between the sensors -- 6.3.2. The sensor network's display -- 6.4. Weather conditions -- 6.5. Analysis processing -- 6.5.1. Analysis before installation -- 6.5.2. Analysis of the development's aftermath -- 6.6. Conclusion -- 6.7. Acknowledgments -- 6.8. Bibliography -- Chapter 7: Large Deformable Antennas -- 7.1. Introduction -- 7.2. Mechanical analysis -- 7.3. Optical instrumentation for deformable antennas -- 7.3.1. Principle of the optical sensor based on fiber ribbons -- 7.3.2. Principle of optical sensor based on polarization rotation -- 7.4. Experience on a planar structure -- 7.5. Conclusion -- 7.6. Acknowledgments -- 7.7. Bibliography -- List of Authors -- Index.