Cover -- Title Page -- Copyright -- Foreword -- Preface -- Acknowledgments -- List of Constants -- Chapter 1: Introduction -- 1.1 Matter and The Mass Spectrometer -- 1.2 Secondary Ion Mass Spectrometry -- 1.3 Summary -- Section I: Principles -- Chapter 2: Properties of Atoms, Ions, Molecules, and Solids -- 2.1 The Atom -- 2.2 Electronic Structure of Atoms and Ions -- 2.3 Summary -- Chapter 3: Sputtering and Ion Formation -- 3.1 The Fundamentals of Sims -- 3.2 Sputtering -- 3.3 Ionization/Neutralization -- 3.4 Summary -- Section II: Practices -- Chapter 4: Instrumentation Used in SIMS -- 4.1 The Science of Measurement -- 4.2 Hardware -- 4.3 Summary -- Chapter 5: Data Collection and Processing -- 5.1 The Art of Measurement -- 5.2 Sample Preparation and Handling -- 5.3 Data Collection -- 5.4 Data Processing -- 5.5 Summary -- Appendix A -- A.1 Periodic Table of the Elements -- A.2 Isotopic Masses, Natural Isotope Abundances, Atomic Weights, and Mass Densities of the Elements -- A.4 Work-Function Values of Elemental Solids -- A.5 SIMS Detection Limits of Selected Elements -- A.6 Charged Particle Beam Transport -- A.7 Some Statistical Distributions of Interest -- A.8 SIMS Instrument Designs -- A.9 Additional Sims Methods of Interest -- A.10 Additional Spectroscopic/Spectrometric Techniques -- A.11 Additional Microscopies -- A.12 Diffraction/Reflection Techniques of Interest -- Technique Acronym List -- Abbreviations Commonly used in SIMS -- Glossary of Terms -- Questions and Answers -- References -- Index -- End User License Agreement.