Diamond chemical vapor deposition nucleation and early growth stages
Title:
Diamond chemical vapor deposition nucleation and early growth stages
Author:
Liu, Huimin, 1961-
ISBN:
9781591240433
9780815513803
9780815516873
9780080946184
Personal Author:
Publication Information:
Park Ridge, N.J. : Noyes Publications, ©1995.
Physical Description:
1 online resource (xi, 195 pages) : illustrations.
Series:
Materials science and process technology series. Electronic materials and process technology
Materials science and process technology series. Electronic materials and process technology.
Contents:
General Introduction -- Atomic and Crystal Structures of Diamond -- Diamond CVD Techniques -- Diamond Nucleation Mechanisms -- Effects of Surface Conditions on Diamond Nucleation -- Effects of Deposition Conditions on Diamond Nucleation -- Theoretical and Modeling Studies on Diamond Nucleation -- References -- Index.
Abstract:
This book presents a systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth stages of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experienced researchers, scientists, and engineers in academics and industry with the latest developments in this growing field.
Genre:
Added Author:
Electronic Access:
Knovel http://app.knovel.com/web/toc.v/cid:kpDCVD0005