Introduction -- An approach to MEMS design -- Microfabrication -- Process integration -- Lumped modeling -- Energy-conserving transducers -- Dynamics -- Elasticity -- Structures -- Energy methods -- Dissipation and the thermal energy domain -- Lumped modeling of dissipative processes -- Fluids -- Electronics -- Feedback systems -- Noise -- Packaging -- A piezoresistive pressure sensor -- A capacitive accelerometer -- Electrostatic projection displays -- A piezoelectric rate gyroscope -- DNA amplification -- A microbridge gas sensor.