Handbook of surface and nanometrology
Title:
Handbook of surface and nanometrology
Author:
Whitehouse, D. J. (David J.)
Personal Author:
Edition:
2nd ed.
Publication Information:
Boca Raton, FL : CRC Press, c2011.
Physical Description:
xxiii, 975 p. : ill.
General Note:
Rev. ed. of: Handbook of surface metrology. c1994.
Genre:
Added Corporate Author:
Electronic Access:
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