Computational lithography
Title:
Computational lithography
Author:
Ma, Xu, 1983-
ISBN:
9780470618943
9780470618936
9780470596975
9781118043578
Personal Author:
Publication Information:
Hoboken, N.J. : Wiley, ©2010.
Physical Description:
1 online resource (xv, 226 pages) : illustrations
Series:
Wiley series in pure and applied optics
Wiley series in pure and applied optics.
Local Note:
O'Reilly
Subject Term:
Added Author:
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