Atomically Traceable Nanostructure Fabrication
Title:
Atomically Traceable Nanostructure Fabrication
Author:
Ballard, Josh B.
Personal Author:
Publication Information:
Cambridge, MA MyJoVE Corp 2016
Physical Description:
online resource (755 seconds)
Series:
Engineering
General Note:
Title from resource description page
Abstract:
We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.
Reading Level:
For undergraduate, graduate, and professional students
Subject Term:
Electronic Access:
https://www.jove.com/t/52900