Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Title:
Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Author:
Bourgade, Thomas
Personal Author:
Publication Information:
Cambridge, MA MyJoVE Corp 2016
Physical Description:
online resource (628 seconds)
Series:
Engineering
General Note:
Title from resource description page
Abstract:
We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.
Reading Level:
For undergraduate, graduate, and professional students
Subject Term:
Electronic Access:
https://www.jove.com/t/53630