Digital Holography for MEMS and Microsystem Metrology -- Contents -- About the Editor -- Contributors -- Series Preface -- Acknowledgements -- Abbreviations -- 1 Introduction -- 2 Digital Reflection Holography and Applications -- 2.1 Introduction to Digital Holography and Methods -- 2.1.1 Holography and Digital Holography -- 2.1.2 Digital Recording Mechanism -- 2.1.3 Numerical Reconstruction Methods -- 2.2 Reflection Digital Holographic Microscope (DHM) Systems Development -- 2.2.1 Optical Systems and Methodology -- 2.3 3D Imaging, Static and Dynamic Measurements -- 2.3.1 Numerical Phase and 3D Measurements -- 2.3.2 Digital Holographic Interferometry -- 2.4 MEMS/Microsystems Characterization Applications -- 2.4.1 3D Measurements -- 2.4.2 Static Measurements and Dynamic Interferometric Measurement -- 2.4.3 Vibration Analysis -- References -- 3 Digital Transmission Holography and Applications -- 3.1 Historical Introduction -- 3.2 The Foundation of Digital Holography [30] -- 3.2.1 Theoretical Analysis of Wavefront Interference -- 3.2.2 Digital Hologram Recording and Reconstruction -- 3.2.3 Different Numerical Reconstruction Algorithms -- 3.3 Digital Holographic Microscopy System -- 3.3.1 Digital Holographic Microscopy with Physical Spherical Phase Compensation -- 3.3.2 Lens-Less Common-Path Digital Holographic Microscope -- 3.3.3 Common-Path Digital Holographic Microscope -- 3.3.4 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation : Light with Long Coherence Length -- 3.3.5 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation : Light with Short Coherence Length -- 3.4 Conclusion -- References -- 4 Digital In-Line Holography and Applications -- 4.1 Background -- 4.2 Digital In-Line Holography -- 4.2.1 Recording and Reconstruction -- 4.3 Methodology for 2D Measurement of Micro-Particles.

4.3.1 Numerical Reconstruction, Pre-Processing and Background Correction -- 4.3.2 Image Segmentation -- 4.3.3 Particle Focusing -- 4.3.4 Particle Size Measurement -- 4.4 Validation and Performance of the 2D Measurement Method -- 4.4.1 Verification of the Focusing Algorithm -- 4.4.2 Spherical Beads on a Glass Slide -- 4.4.3 Microspheres in a Flowing System Normalized Population -- 4.4.4 10 μm Microspheres Suspension -- 4.4.5 Measurement of Microfibers -- 4.5 Methodology for 3D Measurement of Micro-Fibers -- 4.5.1 Method 1: The 3D Point Cloud Method -- 4.5.2 Method 2: The Superimposition Method -- 4.6 Validation and Performance of the 3D Measurement Methods -- 4.6.1 Experiment with a Single Fiber -- 4.6.2 3D Measurements of Micro-Fibers in Suspension -- 4.7 Conclusion -- References -- 5 Other Applications -- 5.1 Recording Plane Division Multiplexing (RDM) in Digital Holography for Resolution Enhancement -- 5.1.1 Introduction of the Recording Plane Division Multiplexing Technique -- 5.1.1.1 The SM Technique -- 5.1.1.2 The ADM Technique -- 5.1.1.3 The WDM Technique -- 5.1.1.4 The PM Technique -- 5.1.2 RDM Implemented in Pulsed Digital Holography for Ultra-Fast Recording -- 5.1.2.1 Introduction -- 5.1.2.2 AMD in the Pulsed Digital Holography -- 5.1.2.3 WDM in Pulsed Digital Holography -- 5.1.3 RDM Implemented by Digital Holography for Spatial Resolution Enhancement -- 5.1.3.1 Introduction -- 5.1.3.2 AMD in Digital Holography -- 5.1.3.3 AMD and PM in Digital Holography -- 5.1.4 Conclusion -- References -- 5.2 Development of Digital Holographic Tomography -- 5.2.1 Introduction -- 5.2.2 Classification of Digital Holographic Tomography -- 5.2.3 Principle of Digital Holographic Tomography -- 5.2.3.1 Principle of Digital Holography -- 5.2.3.2 Reconstruction Principle of Computer Tomography -- 5.2.3.3 CT Reconstruction Algorithms -- 5.2.4 Application of DHT.

5.2.4.1 Detection of Biological Tissue -- 5.2.4.2 Material Detection -- References -- 5.3 Digital Holographic Interferometry for Phase Distribution Measurement -- 5.3.1 Measurement Principle of Digital Holographic Interferometry -- 5.3.1.1 Principle of Phase Measurement of the Object Wave Field -- 5.3.1.2 Principle of Digital Holographic Interferometry -- 5.3.2 Applications of Digital Holographic Interferometry in Surface Profile Testing of MEMS/MOEMS -- 5.3.3 Applications of Digital Holographic Interferometry in Measuring Refractive Index Distribution -- 5.3.3.1 Measurement of Light-Induced Index Change in Photorefractive Crystals -- 5.3.3.2 Measurement of Acoustic Standing Wave Field -- 5.3.3.3 Measurement of Plasma Plume Field -- 5.3.3.4 Measurement of Temperature Distribution in Air Field -- 5.3.3.5 Visualization Measurement of Turbulent Flow Field in Water -- References -- 6 Conclusion -- Index.