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Principles of MEMS
Title:
Principles of MEMS
Author:
Lee, Ki Bang.
ISBN:
9780470649671

9780470649664

9781118102244
Personal Author:
Lee, Ki Bang.
Publication Information:
Hoboken, N.J. : WILEY, ©2010.
Physical Description:
1 online resource (xii, 667 pages) : illustrations
Local Note:
O'Reilly
Subject Term:
Microelectromechanical systems.

Micro-Electrical-Mechanical Systems

Microsystèmes électromécaniques.

TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.

TECHNOLOGY & ENGINEERING -- Electronics -- Digital.

Microelectromechanical systems. (OCoLC)fst01019745
Genre:
Electronic books.
Electronic Access:
https://go.oreilly.com/library-access/library/view/-/9781118102244/?ar
https://learning.oreilly.com/library/view/~/9781118102244/?ar
Holds: Copies:

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