One of the requirements of daily life, the most preferred rechargeable batteries are Li-ion batteries because of high energy, long life cycle and eco-friendly properties. Having high energy density, no memory effect and slow energy losses, these batteries have applications in portable electronic devices, power source for space vehicles, electric cars etc. Furthermore, there is a strong interest in all solid-state rechargeable lithium-ion battery research, because these batteries will replace the conventional liquid electrolyte Li-ion batteries due to use of non-combustible inorganic solid electrolyte, which has high safety and reliability. While the bulk ionic conductivity of La0.5Li0.5TiO3 (LLTO) produced by solid-state reaction is 10-3 S/cm, the total ionic conductivity of LLTO is 10-5 S/cm. Another way to increase ionic property is to dope the solid electrolyte with transition metals. The substitution of transition metal leads to decrease of the lattice parameter because of reduced average ionic radius. This causes increase of Li-ion content and also ionic conductivity. In this study, initially pure and Al doped targets were fabricated by using solid-state reaction after that the available targets are placed to the sputtering gun. When the all optimizations of the system were completed, pure and Al doped LLTO thin films were deposited by RF (radio frequency) magnetron sputtering technique on ITO coated soda lime glass substrates. While the thin film was been deposited, the substrate was heated at approximately 220 oC. For ionic conductivity measurement of the Al doped LLTO electrolyte, small circular Al contact regions were created on Al doped LLTO thin films by thermal evaporation system. Afterword the impedance spectra of the sandwich structure in a frequency range of 1 Hz - 200 MHz was recorded by using probe station. Thickness, the crystal structure, optical transmission, chemical compositions, surfaces and porosity of the thin films are investigated by surface profilometer, XRD, UV-Visible Spectroscopy, XPS, and Raman Spectroscopy respectively.