By the improving technology, usage of robotic manipulators has been increased a lot in last decades. Robotic manipulators are usually used in continuous production and dangerous operations. General industries, medical applications and space missions are the most important usage areas for these manipulators. In these applications, the manipulator faces to deviation of the end effecter which depends on many reasons like friction, vibration, elastic and plastic deformations. However, the robotic calculations made, as the links of the manipulator are rigid and other effects are neglected.The aim of this thesis is to improve a path generation analysis method for the three link flexible planer manipulator. The three link manipulator is considered to investigate the flexibility effect of links on path generation. Firstly the problem and solution method is introduced then the inverse kinematic analysis is applied for the three link rigid planer manipulator. The finite element model of the three link flexible planer manipulator is developed by using the plane frame element. The general equations of the tip point displacements of the three link flexible planer manipulator are expressed and Matlab program is coded. Finally, the library robots made by aluminum and steel are chosen for numerical examples. In conclusion the results of numerical example are shown for each position of the manipulator and discussed.