In this study, crystalline lithium lanthanum titanium (aluminum) oxide Li0.5La0.5Ti1-xAlxO3 (LLTO) powder targets with different Aluminum (x) content were prepared by conventional solid state reactions as Li0.5La0.5TiO3, Li0.5La0.5Ti0.99Al0.01O3, Li0.5La0.5Ti0.95Al0.05O3, Li0.5La0.5Ti0.90Al0.10O3 and Li0.5La0.5Ti0.85Al0.15O3 compositions. Then, after a couple of calcination processes with regrinding of the prepared stoichiometric powder batch, it is placed into Cu-base plate to be pressed in order to provide a compact, dense and smooth target surface for the thin film deposition. For the thin film fabrication, radio frequency (RF) magnetron sputtering technique is used to sputter the dielectric target. Thin films were deposited on soda-lime glass (SLG) and 256 nm thick indium tin oxide (ITO) layer grown on soda-lime glass (SLG) substrates. For the electrical measurements of LLTO thin film, it was fundamental to have ITO as conducting layer electrode. Targets with various Al (x) compositions were deposited for the investigation of Ti substitution with Al on structural and electrical properties. Besides, crystalline structure of the targets was characterized by X-ray powder diffraction (XRPD) and Raman Spectroscopy analysis while structural, morphological and compositional properties of the thin films were determined by x-ray diffraction (XRD), scanning electron microscope (SEM) and x-ray photoelectron spectroscopy (XPS) respectively. Moreover, in order to understand the effect of Al doping on ionic conductivity, electrical measurements were performed at room temperature by AC impedance spectroscopy forming ITO/LLTO/Al capacitor like structure. Maximum ionic conductivity result is obtained for Li0.5La0.5Ti0.95Al0.05O3 thin film composition. Also, temperature dependent ionic conductivity measurements were performed from 298 K to 373 K to evaluate activation energy for the Li-ion conduction. Keywords: Ionic conductivity, Li0.5La0.5Ti1-xAlxO3, electrolyte, thin film, activation energy, RF magnetron sputtering