Surface oxidation is a general problem for certain industrial applications such as coating and painting of the finished rolled products. A detailed understanding for the oxide growth mechanism as well as the development of a simple analytical method to measure this oxide thickness is very important in aluminum rolling industry and this study aims to develop a spectroscopic method to determine the oxide thicknesses on the surface of the aluminum by using multivariate calibration and infrared spectroscopy. Two main series of different aluminum alloys (3005 and 3003BZ) were selected in this study to develop a proposed methodology which is based on the combination of Fourier Transform Infrared Spectroscopy (FTIR) with Grazing Angle ATR accessory and chemometrics multivariate calibration techniques. In order to obtain oxide thickness values, X-ray Photoelectron Spectroscopy (XPS) was used and aluminum oxide (Al2O3) and magnesium oxide (MgO) thicknesses determinations were carried out by two different multivariate calibration models which are Genetic Inverse Least Squares (GILS) and Genetic Partial Least Squares (GPLS). These models were able to predict Al2O3 and MgO thicknesses using FTIR that is faster, easier and cheaper to operate as well as from XPS. The correlation coefficients of XPS reference oxide thickness values versus FTIR-GATR based GILS and GPLS predicted values were better than 0.919 in range of 0 to 25 nanometers for Al2O3 and 0 to 35 nm for MgO. These results suggest that grazing angle FTIR-ATR spectroscopy may offer a simple and nondestructive alternative for quick determination of oxide layer thickness.