NEMS/MEMS Technology and Devices, ICMAT2011 -- Preface -- Table of Contents -- Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors -- Thick-Film Deposition of High-Viscous Liquid Photopolymer -- Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application -- Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever -- Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure -- Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force -- A Static Micromixer Inspired from Fractal-Like Natural Flow Systems -- AlN Actuator for Tunable RFMEMS Capacitor -- GEMS: A MEMS-Based Way for the Innervation of Materials -- On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems -- Design Consideration of Membrane Structure for Thermal Actuated Micropump -- Developing High Sensitivity Biomass Sensor Using Lamé Mode Square Resonator -- Fabrication of a Peltier Device Based on InSb and SbTe Thin Films -- Gapfill Study of Polyimides for MEMS Applications -- A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film Transistor -- Wireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications -- Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator -- FBAR Resonators with Sufficient High Q for RF Filter Implementation -- Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators -- Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis -- Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement -- Focused Ion Beam Fabricated Polystyrene-Platinum Thermal Microactuator -- Lead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications.

Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants -- Tagging for Capsule Endoscopy Localization -- The Negative π/2 Phase Shift of Total Reflect Light -- High Topography Polyimide CMP Process -- Hydridosilane Modification of Metals: An Exploratory Study -- Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor -- Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid Film -- A New Peltier Device with a Coaxial Thermocouple -- A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device -- Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography -- Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches -- Double-Step Plasma Etching for SiO2 Microcantilever Release -- Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators -- Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide -- Oscillating Micromixers on a Compact Disc -- Robust Sequential Flow Controls on the Centrifugal Platform -- Fabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide Films -- Effect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin Films -- Fabrication of MEMS Based Microspeaker Using Bulk Micromachining Technique -- Simulation Study of Side-by-Side Spiral Coil Design for Micromagnetometer -- Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-Disc -- Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier Device -- Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron Sputtering.

On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded Chips -- A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab -- A New Robust Four Degree-of-Freedom Gyroscope Design -- Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb Electrodes -- Investigation of Rhabdomyosarcoma Cell Electrofusion -- Investigation of Simple Process Technology for the Fabrication of Valveless Micropumps -- Micro-Bubble Generation Using Continuous-Wave Laser -- Photocatalytic Microreactor Using Monochromatic Visible Light -- Keywords Index -- Authors Index.